非线性小数重合法及其在轮廓测量中的应用

Nonlinear Excess Fraction Method and its Applications to Profilometry

叠相还原的困难是光栅投影式轮廓测量技术中影响可靠性和阻碍自动化测量的最大问题。本文提出了一种新型的时域叠相还原算法 非线性小数重合法， 这种新方法可以将可靠测量范围扩大数十倍， 而不失测量精度。文中详细论述了非线性小数重合法的原理， 并给出了复杂轮廓的可靠测量的实验结果。

The difficulty in phase unwrapping is the key problem that compromises reliability and prevents automatic measurement in grating projection profilometry. A novel temporal phase unwrapping algorithmnon linear excess fraction method (NLEFM) is proposed, which may extend the reliable measuring range by a factor of dozens without losing accuracy. The principle of NLEFM is detailed and experimental results are given in which complex profiles are reliably computed using this algorithm.