摘要
研究了铟锡氧化物(ITO)粉末退火后的组织和结构,比较了不同状态的粉末和制备工艺对ITO靶材的影响。结果表明,纳米ITO粉末在800℃以下具有体心立方In2O3结构,1100℃退火后由In2O3和SnO2两相组成;ITO粉末经过喷雾造粒后,形成了实心球形颗粒并具有合理的颗粒级配,通过气氛烧结可以制备出高密度优良的ITO靶材。
The microstructure and component of indium tin oxide（ITO） powder are studied,and the influences of different state powders and preparation techniques on the ITO targets are compared.The results show that the ITO nano-powder possesses body center cubic In2O3 structure when is annealed at temperature below 800℃,and is composed of In2O3 and SnO2 phases when is annealed at 1100℃.After spray drying,the solid sphere granulated powder is obtained,which possesses a suitable particles grade match,and the excellent ITO targets with high density are prepared by using atmosphere sintering.
出处
《材料开发与应用》
CAS
2011年第3期26-29,共4页
Development and Application of Materials
