ZnO:Cd薄膜光学性能的研究

Investigation of Optical Performance about Cd-doped ZnO Thin Films

本文以载玻片、石英为基底,采用控制掺杂方法,制备了ZnO:Cd薄膜,通过热处理方法获得了优良性能的ZnO:Cd薄膜。研究分析了镉浓度为2%-10%时ZnO薄膜的透射光谱。结果表明,有较强的紫外发射峰,但没有深能级发射,未出现其它的发射峰,说明ZnO:Cd薄膜在紫外线区的发射占主导地位,表明带间跃迁占主导地位。

This paper makes a study and analysis on the transmission spectrum of ZnO thin film when the cadmium concentration is 2%-10% by using the slide and quartz as the substrate.In the experiment,only relatively strong UV emission peaks arefound and there is no deep-level emission,which indicates that the emission in the UV range is the predominant emission of ZnO： Cd thin film and so is the band-to-band transition.The controlled doping method is adopted to prepare ZnO： Cd thin film,and heat treatment is employed to improve the performance of the film and optimize the process parameters.