纳米电子器件呼唤真空化学研究

Nanoelectronic Devices Calls for Vacuum Chemistry

纳米电子器件是微电子器件发展的下一代 ,现有微电子器件的主要材料是极纯的硅、锗和镓砷等晶体半导体。纳米电子器件有可能是以有机或有机 /无机复合晶体薄膜为主要材料 ,要求纯度更高 ,结构更完善。真空制备的清洁环境 ,有希望加工组装出纳米电子器件所要求的结构。

Nanoelectronic devices will be the next generation of electronic devices.In contrast to microelectronic devices,which are mainly made of high purity semiconductor materials including Si,Ge and GaAs etc.,possible basic materials to be used to fabricate nanoelectronic devices will be organic and/or inorganic/organic compound thin films with extremely high purity.Since trace impurities and atomic defects may strongly affects nanoelectronics operation,the films should be well ordered and well defined on nanometer or even up to atomic scale.To meet these extreme technical requirements,vacuum,or even ultra high vacuum environment will be a must in studies of self organization and in fabricating nanostructures required by nanoelectronic devices.An emerging field vacuum chemistry will be the focus of attention in the 21st century.