摘要
运用玻耳兹曼方程研究金属薄膜中的电子输运 ,考虑了来自表面和晶粒间界的散射 ,计算连续金属薄膜的平行电阻率。得到的电阻率理论曲线与实验曲线符合得很好。弥补了F S理论在较薄厚度时电阻率理论结果与实验结果不相符的缺陷。
Electron transport in metallic films were studied by means of Boltzmann equation to evaluate its in plane resistivities.In our calculation,electron scattering due to either film surfaces and grain boundaries was considered.Our calculation agrees well with experimental results;whereas Fuchs Sondheimer theory fails to provide any result close to experimental studies for thin films.
出处
《真空科学与技术》
EI
CAS
CSCD
北大核心
1999年第6期445-451,共7页
Vacuum Science and Technology
关键词
金属薄膜
玻耳兹曼方程
F-S理论
电阻率
Metallic film,Bolatzmann equation,Fuchs Sondheimer theory,Resistivity
