摘要
对各种薄膜制备方法的特点(即物理方法、化学方法)进行阐述,并且从氧化物和非氧化物的角度,综述了陶瓷薄膜作为硬质薄膜、气敏薄膜以及铁电、压电等微电子薄膜的应用。
The characteristics of methods for preparing ceramic thin films, namely physical and chemical methods, have been elaborated, and the applications of ceramic thin films have been summarized based on their unusual hardness and unique electrical behavior as oxides and non-oxides.
出处
《材料导报》
EI
CAS
CSCD
北大核心
1999年第6期35-38,共4页
Materials Reports
