微流控芯片的材料与加工方法研究进展

Research progress of materials and fabrication methods of microfluidic chip

综述了微流控芯片的制作材料及其加工方法的研究进展。在介绍了传统硅质材料,如硅、玻璃、石英等的基础上,着重描述了高分子聚合物材料在微流控芯片的应用趋势。针对不同材料,详叙了其材料特性、应用范围及加工方法。特别介绍了一些新的加工方法,如激光刻蚀法、软光刻、LIGA方法在该领域的应用。针对微流控芯片的材料与加工做了一个简要而系统的回顾,对微流控芯片和其他微型全分析系统的研究者有重要参考价值。

Research progress of materials and fabrication methods of microfluidic chip is reviewed.On the basis of the introduction of traditional materials such as silicon,glass and quartz,the application trend of polymer in the chip-fabrication fields is emphasized.For different materials,their properties,application range and fabrication methods are described in detail.Some new fabrication methods such as laser cutting,soft lithography and LIGA and their application in this field are specially introduced.A simple and systemic review on the materials and fabrication methods in microfluidic chip is given,and it has important reference value for the researchers in microfluidic chip and miniaturized total analysis system fields.