不同摩擦偶件对单晶硅摩擦磨损行为影响的对比研究

Comparative Study on Effects of Different Counterparts on Friction and Wear Behavior of Single Crystal Silicon

对比研究Al2O3和玛瑙球对单晶硅摩擦磨损行为的影响。结果表明:单晶硅与Al2O3和玛瑙球对摩时,摩擦因数均随滑动速度的增加而降低,二者与单晶硅对摩时的摩擦因数相差很小;与Al2O3和玛瑙球对摩时,单晶硅的磨损体积损失均随滑动速度的增加而减小;在相同实验条件下,与Al2O3球对摩时;单晶硅的磨损体积损失明显大于与玛瑙球对摩时的。单晶硅与Al2O3和玛瑙球对摩的磨损机制基本相同:低速下以微断裂和塑性变形为主,高速下以较光滑表面为特征,即存在"速度效应"。相比于Al2O3与单晶硅对摩时,玛瑙与单晶硅对摩时的单晶硅磨损表面更光滑,主要与Al2O3、玛瑙及单晶硅的物理力学性能有关,尤其与材料的硬度有关。

Friction and wear behaviors of single crystal silicon sliding against different counterparts（Al2O3 and agate） were compara-tively studied.Results show that friction coefficient between single crystal silicon and Al2O3 decreases with the increasing of sliding velocity,and it is the same as that between single crystal silicon and agate.Wear volume losses of single crystal silicon sliding against different counterparts all decrease with the increasing of sliding velocity.Under the same experimental conditions,single crystal sili-con coupled with Al2O3 displays greater wear volume loss than silicon slid against agate.Regardless of whether the single crystal silicon is sliding against Al2O3 or agate,it has the same wear mechanism.In other words,the worn surfaces of the silicon are charac-terized by a large number of micro-fractures and plastic deformation when sliding at low speed,while those of the silicon show some kind of polishing effect when sliding occurs at high speed;that is to say,there exists a ＂velocity effect＂.However,worn surfaces of the silicon sliding against agate are smoother than those of the silicon sliding against Al2O3.And these are related to the physical and mechanical properties of single crystal silicon,Al2O3 and agate,especially the hardness of the materials.