CO_2激光直写PMMA微流道凸起仿真研究

Simulation research on bulge formation by CO_2 laser micromachining PMMA substrate microchannel

建立了激光烧蚀流道凸起模型,获得了流道凸起与激光功率和作用时间的关系。模拟结果表明:增大激光扫描速度,减小激光照射时间,选择较低的激光功率可以减小流道凸起高度。模拟结果对激光直写PMMA微流道表面质量控制有指导意义。

In this paper a bulge model was gained and then the relation between bulge and laser power and processing time.The simulation results show that increasing laser scanning speed,reducing the irradiation time and preferring lower laser power can reduce the bulge height.The simulation results can direct the improvement of surface quality for laser machining PMMA microchannel.