摘要
在传统双边四梁微加速度计结构的基础上,设计了一种新型MEMS低量程微加速度计,量程为±10 g。用ANSYS有限元软件对加速度计的结构建立仿真模型,进行应力、模态及抗冲击能力分析。加速度计供电电压为5 V时,灵敏度理论值达到1.029 mV/g,与传统结构相比,极大地提高了低量程微加速度计的灵敏度。
A new MEMS micro-accelerometer with low range was designed based on traditional bilateral four-beam micro-accelerometer.The new accelerometer has a measuring range of ±10 g.Model of the accelerometer structure was established,and stress,modal and shock-resistant capability were analyzed using ANSYS finite element software.Operating at 5 V supply power,the accelerometer had a theoretical sensitivity up to 1.029 mV/g,greatly improving sensitivity of the low-range micro-accelerometer,compared to the traditional structure.
出处
《微电子学》
CAS
CSCD
北大核心
2011年第3期416-419,共4页
Microelectronics
基金
山西省自然科学基金资助项目(2010011026-2)
