摘要
本文研究了国产磨料的成分、杂质和磨料、磨具对硅片的污染,分析了铁对硅器件的危害,提出了减少污染的方法.
The composition and impurity of abrasive materials made in china and the contamination or silicon plate from abrasive materials and abrasive tools are investigated,the damage or iron to silicon devices is analyzed,and ways in reducing the contamination are presented.
出处
《西安交通大学学报》
EI
CAS
CSCD
北大核心
1990年第6期123-128,58,共7页
Journal of Xi'an Jiaotong University
关键词
杂质
研磨
硅
磨料
污染
silicon
abrasive
contamination
