摘要
对错位网络在衬底区Ｓｉ 中弹性位移场和应变场［１］ 进行了模拟计算－ 理论计算结果与实验图片吻合，证实了衬底区Ｈｏｌｚ 线弯曲是起因于超晶格界面晶格畸变－ 另外还计算分析了Ｇｅ 含量，以及ＧｅｘＳｉ１－ ｘ／Ｓｉ 层厚对应变场和Ｈｏｌｚ 线的影响，得到关于该场的一些信息－
In the substrate Si, a elastic dislocation and strain field induced by the dislocation networks are simulated The simulating pattern consists with that obtained by experiment, which show that the cure distortions of some holz lines result from the lattice distortion of the interfaces of the superlattice In addition, the influences of the content of Ge and the thickness of the layers constructing the superlattice on the Holz line pattern and the elastic field are discussed
