摘要
在半导体封装技术领域,切割机是一种极其重要的封装设备,而电主轴则是切割机非常重要的一个执行部件,所以,对主轴电机技术的研究据有实际意义。介绍了主轴中电机的设计、加工技术。
In the area of semiconductor seal technology,the Dicing Saw is one kind of extremely important seal equipment,and the spindle is a very important executive component in the Dicing Saw,therefore,the research on the spindle motor has very importantly practical significance.In this paper,the design methods and the manufacture processing are introduced.
出处
《电子工业专用设备》
2011年第6期37-40,共4页
Equipment for Electronic Products Manufacturing
