半导体用高纯超细SiC粉体的表面改性

Surface Modification of High Ultrafine SiC Powders for Semiconductor Manufacturing

通过偶联剂预处理、接枝聚合丙烯酸钠两步法对SiC粉体进行表面改性,制备聚丙烯酸钠接枝改性SiC粉体,并对改性粉体进行表征,测试SiC粉体的zeta电位,讨论改性对SiC粉体料浆分散稳定性和流动性的影响。结果表明:SiC微粉经表面改性后并未改变原始SiC微粉的物相结构,只是改变其在水中的胶体性质;微粉团聚现象减少,分散性得到改善;改性SiC微粉与原始SiC微粉相比,表面特性发生很大变化,zeta电位值显著提高,悬浮液的分散稳定性得到明显改善,且黏度降低。

The modified SiC powders was prepared by organics coating method. The coupling agent was used as bridge to connet the SiC powders and the organic polymers. Sodium polyacrylate as a dispersion functional layer was formed on the surface of SiC powders by graft polymerization reaction. Zeta potential of SiC powders was tested and the effect of suface modification on the dispersion and fluidity of SiC slurry was discussed. The results showed that the SiC powders treated by modification did not change the phase structure of original SiC powders, it just changed the colloidal properties in water, reunion reduced and dispersion property improved of SiC powders. Compared with the original SiC powders, the surface characteristics of the modified SiC powders occurred a great change and zeta potential improved. The dispersion stabilization of SiC slurry increased remarkably and viscosity decreased.