一种保护玻璃防水雾透明导电薄膜的设计与制备

Design and Preparation of Water-Proof and Antifog Transparent Conductive Coatings for Protecting Glass

为了使光学仪器能适应低温潮湿环境,设计了一种复合型的保护玻璃防水雾透明导电薄膜。采用非平衡闭合磁场反应溅射技术在K9玻璃基底上沉积了氧化铟锡(ITO)导电膜以及复合型的透明导电膜系。采用光谱仪、方阻仪测试了样品的透射光谱以及方块电阻,并对样品进行了环境试验。结果表明,样品的光学技术指标以及抗恶劣环境性能均达到了使用要求。

Transparent conductive coatings on glass window is designal to make opticed system adapte to low temperature and humid environment. ITO coatings and multilayer transparent conductive coatings are deposited onto K9 substrate by means of unbalanced closed field magnetron sputtering. Transmittance and sheet resistance are investigated by spectrometer and four probe ohmmeter. All samples with high optical performance pass the environmental test. The experimental results show that the optical technique specification and the performance of anti-adverse arcumstances are satisfy with the service request.