期刊文献+

铜线键合优势和工艺的优化 被引量:2

The Advantage and Process Optimization for Copper Wire Bond
下载PDF
导出
摘要 半导体封装对于芯片来说是必须的,也是至关重要的。封装可以指安装半导体集成电路芯片用的外壳,它不仅起着保护芯片和增强导热性能的作用,而且还起到沟通芯片内部世界与外部电路桥梁和规格通用功能的作用。文章阐述了铜线键合替代金线的优势,包括更低的成本、更低的电阻率、更慢的金属间渗透。再通过铜线的挑战——易氧化、铜线硬度大等,提出了在实际应用中工艺的优化,如防氧化装置、铜丝劈刀的参数、压力和超声的优化等。 Regarding the chip,it is not only necessary but also a must.It can also be said that the seal refers to the other casing which the installed semiconductor integrated circuit uses.It not only improves the protection of the chip and enhanced heat transmission performance but also links the chips interior and exterior electric bridge circuit standard functions.Expound the advantage of the replacement of the golden wire by copper wire,include the low cost,resistance and IMC growth.For the challenge of copper wire-easy oxidation,hardness and so on,put forward the process optimization in the practical application,such as equipment for anti-oxidization,parameter optimization for press and ultrasonic,the capillary for copper wire and so on.
机构地区 苏州大学
出处 《电子与封装》 2011年第6期1-3,共3页 Electronics & Packaging
关键词 半导体封装 引线键合 铜线键合 semiconductor packaging wire bond copper wire bond
  • 相关文献

参考文献2

二级参考文献32

  • 1Harman G. Wire bonding in microelectronics : materials, processess, reliability, and yield [ M ]. Second edition, McGraw Hill, New York, USA, 1997.
  • 2Hang Chunjin,Wang Chunqing, Shi Mingda. Study of copper free air ball in thermosonic copper ball bonding[ C ]. 6th International Conference on Electronic Packaging Technology. Shenzhen, Guangdong, China, 2005.
  • 3Michael Sheaffer, Lee R Levine, Brian Schlain. Optimizing the wire -bonding process for copper ball bonding, using classic experimental designs [ J ]. IEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1987, 10(3) :321 -326.
  • 4Inderjit Singh,Jiayu On,Lee Levine. Enhancing fine pitch, high I/O devices with copper ball bonding[ C]. IEEE Electronic Components and Technology Conference, Lake Buena Vista, FL, USA, 2005.
  • 5Hong Shouyu, Hang Chunjing,Wang Chunqing. Experiment research of copper wire ball bonding [ C ]. 6th International Conference on Electronic Packaging Technology. Shenzhen, Guangdong, China,2005.
  • 6Kenji Toyozawa, Kazuya FujiTa, Syozo Minamide, et al. Development of copper wire bonding application technology [ J ]. IEEE Transactions On Components, Hybrids, and Manufacturing Technology, 1990,13 (4) : 667 - 672.
  • 7Shingo Kaimori ,Tsuyoshi Nonaka,Akira Mizoguehi. The development of Cu bonding wire with oxidation - resistant metal coating [ J]. IEEE Transactions on Advanced Packaging, 2006,29 (2) :227 - 231.
  • 8Khoury S L, Burkhard D J, Galloway D P, et al. A comparison of copper and gold wire bonding on integrated circuit devices [ J ]. IEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1990,13 (4) : 673 - 681.
  • 9Chang Hen-So,Hsieh Ker-Chang,Theo Martens,et al. Wire -bond void formation during high temperature aging [ J ]. IEEE Transactions on Components and Packaging Technologies ,2004,27( 1 ) :155 - 160.
  • 10Jonathan Tan, Boon Hoe Toh, Hong Meng Ha. Modelling of free air ball for copper wire bonding [ C ]. 6th Electronics Packaging Technology Conference, Singapore,2004.

共引文献14

同被引文献22

  • 1伍隽,杨邦朝.IC封装材料市场发展分析[J].电子与封装,2002,2(3):7-9. 被引量:4
  • 2陈宏仕.新型铜线键合技术[J].电子元器件应用,2007,9(5):73-75. 被引量:5
  • 3中国电子学会生产技术学分会丛书编委会.微电子封装技术[M].合肥:中国科学技术大学出版社,2003.
  • 4Laura Peters, Bob Fiodalince,David W Price. Exploring ad-vanced interconnect reliability[J]. Semiconductor Internation-al,Jul 2002,(25)6:63-67.
  • 5S. Ramminger,N. Seliger,G. Wachutka. Reliability model for alwire bonds subjected to heel crack failures[J]. MicroelectronicsReliability, 2002,40 : 1521 -1525.
  • 6Shingo Kaimori, Tsuyoshi Nonaka, Akira Mizoguchi. The de-velopment of Cu bonding wire with oxidation-resistant metalcoating[J]. IEEE Transactions on Advanced packaging,2006,29(2):227-231.
  • 7赵钰.高级1C封装中新兴的细铜丝键合工艺[A].第十二届全国混合集成电路学术会议论文汇编[C],2001.
  • 8吴建得,罗宏伟.铜键合线的发展与面临的挑战[A].第十二届全国可靠性物理学术讨论会论文汇编[C] ,2007.
  • 92007版微电子封装键合丝行业调研报告[EB/OL]. http://wenku. baidu. com/view/80bfce4fe45c3b3567ec8bd0. html.
  • 10安徽宏银电子科技有限公司单晶铜键合丝”项目报告[EB/OL ]. http://wenku. baidu. com/link. url =yZVPME6VZhln089jSvDG6uRNRYZ24MgyGbNRc7EwyUI60ZRBE-hkj7cTifJDnS04uxsIuPG-IrP89Lo9uzGhtLVTGV_78xydvR659RGvll_.

引证文献2

二级引证文献9

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部