铝含量对(Ti,Al)N镀层结构及耐磨性的影响

Effect of aluminum content on microstructure and wear resistance of (Ti,Al)N plating film

运用多弧离子镀在Ｗ６Ｍｏ５Ｃｒ４Ｖ２ 高速钢表面沉积了（Ｔｉ，Ａｌ）Ｎ 镀层，并经ＳＥＭ、ＸＲＤ 和ＥＤＳ等方法分析表明，多靶联合工作获得的（Ｔｉ，Ａｌ）Ｎ 镀层，其成分可连续变化，随弧流增大，铝含量增多；随负偏压增大，铝含量降低．弧流与偏压二者对镀层的成分均有影响，其中弧流较为显著．ＸＲＤ分析表明，镀层除（Ｔｉ，Ａｌ）Ｎ 相外，还有（Ｔｉ２ ，Ａｌ）Ｎ 相和Ａｌ２Ｏ３ 等相，且随铝含量的增加，（Ｔｉ，Ａｌ）Ｎ 相的（１１１） 峰减弱，（２００） 面逐渐成为其择优生长晶面．当镀层中铝含量较低时，失效以粘着磨损为主；铝含量较高时，失效以磨粒磨损为主，因此可以通过控制铝含量来提高镀层的耐磨性．

The structure and composition of (Ti, Al)N film deposited by multi-arc ion plating on W6Mo5Cr4V2 is analyzed by Scanning Electron Microscopy(SEM),X-ray diffraction (XRD) and Energy Dispersesd Spectroscopy (EDS). The content of aluminum increasesd with the increasesd of the arc current, but the content of aluminum decreasesd with the increase of the bias voltage both current and voltage have effect on the films,but the effect of the current is more prominent. The results of XRD show that there were (Ti 2, Al)N, (Ti, Al)N and Al 2O 3 in the films. With the increase of Al content,the (111) peak of (Ti, Al)N lowers and the (200) crystal faces become the preferred surfaces gradually. With the increase of aluminum content in the films, the domain wear mechanism change from abrasive to adhesion. In conclusion,the wear resistance can be achieved by controlling the content of aluminum.