光纤激光器光学膜设计与制备

Design and preparation of optical films for fiber lasers

针对激光在传输过程中的光能损失,本文根据光学薄膜理论,设计制备了减反射膜和抗激光的高反射膜,并对激光膜的镀膜材料、膜系设计、沉积工艺及离子辅助沉积等参数进行了深入研究。研究结果表明,制备的减反膜的反射率<0.2%,激光以25°～65°入射时高反射膜的反射率>99.7%。对50μm光纤和K9玻璃镀膜前后的输出功率测试显示多模光纤的功率平均提高了50%,而K9玻璃的反射功率提高到99.85%;另外,制备的光纤激光器光学膜有效地提高了激光损伤阈值,解决了低温冷镀的膜层牢固性问题。

For the energy loss of laser transmitting,an anti-reflection film and a high anti laser reflection film were designed and prepared according to the theory of optical thin film.Coating materials of laser films,coating design,deposition techniques and ion assisted deposition parameters were researched in detail.Results shows that the reflectance of the antireflectance coating is less than 0.2% and the average reflectance of the high reflectance film is higher than 99.7% when the laser incidence is 25°~65°.Furthermore,the experimental tests on 50 μm optical fiber and K9 glass before and after coatings indicate that the average power of optical fiber has increased by 5% and the reflective power of the K9 glass has improve to 99.85%.Moreover,the preparation of optical films of the fiber laser effectively raises the laser damage threshold,and solves the problem of the film firmly under low temperature deposition.