摘要
针对小批量、多品种的化合物半导体芯片研制生产线,在采用批次性管理的同时,要保障人、机、料、法、环、测(5M1E)受控,并突出强调要做到流片有依据、操作按规范(或工艺文件、工艺指导书)、记录应到位、问题要闭环的研制生产原则。对于工艺用主辅材料的初始投入和芯片最终性能监测以及工艺过程中的关键与特殊过程均应加强严格控制,并适时应用了相应的统计过程控制(SPC)技术。采用这些质量控制措施后,流片的成功率由原来的61%左右提升到95%左右,产品的重复性和成品率也得到改善。研制周期大为缩短,研制水平也得到快速提升。
The quality control of small batch and multi-type compound semiconductors production and research line can improve the yield through batch management as well as control in man,machine,material,method,environment and measure （5M1E）.Emphatically,the process control was done according to specifications（manufacturing specification or operation instruction）.The quality records and closed-loop management were carried out.The material selection from beginning to end,the validation of chips,key technologies and special process are controlled especially.The statistical process control（SPC） technology was adopted in this production and research line.After the quality control,the process yield was improved from about 61% initial up to 95% now.The period of development was abridged evidently.The performances of devices developed were also improved.
出处
《半导体技术》
CAS
CSCD
北大核心
2011年第7期524-528,共5页
Semiconductor Technology
关键词
小批量
多品种
研制
工艺控制
统计过程控制
small batch
multi-type
development
process control
statistical process control
