一种垂直梳齿驱动V型梁微镜设计(英文)

Design of a Vertically Comb-Driven Micromirror with V-Shaped Beams

设计了一种垂直梳齿驱动的V型扭转梁支撑的微镜器件。采用有限元仿真和解析方法对该器件进行了静态和动态分析。在100 V直流电压下,镜面转角可达0.7°,能够满足镜面扫描所需要的起始角。同时对比了不同支撑梁结构下的前五阶模态频率以及前两阶频率比,并分析了不同梁间距以及V型梁夹角下各个参数的变化趋势,得出了使微扭转镜工作在最稳定振型的V型梁倾斜角度,确定了所设计结构的优化尺寸。最后对V型梁的扭转应力进行了分析。

A scanning micromirror suspended by a pair of V-shaped beams,driven by vertically electrostatic comb actuators,was designed and modeled.The static and dynamic analysis was carried out by both theory calculation and FEM simulation.The static characteristic shows that a torsion angle of 0.7° can be achieved at 100V DC voltage,which is sufficient for the startup of the mirror scanning operation.Moreover,modal analysis of three types of torsion beams were performed with ANSYS,and the comparison of results reveals that the mirror with V-shaped beams has the most stable torsional mode.The torsional stress are also investigated.