稀土掺杂ZnO半导体气敏传感器的性能研究

Study of the Properties of Rare-Earth Doped ZnO in Semiconductor Gas Sensor

介绍了一种稀土(Tb2O3) 掺杂ZnO气敏传感器的制作工艺和传感器的性能.其特点是选择性好,工作温度比无稀土掺杂的ZnO

In this paper,we introduce a gas senser mechanic technology of rare earth doped material, including its function.Its feature is good in selection and its working temperature is lower than that of the gas sensor without rareearth material.This new discovery may creat a new thought in the application of rareearth element to sensor.