大气压脉冲放电等离子体的研究现状与展望

Review on atmospheric pressure pulsed DC discharge

近年来,大气压脉冲放电等离子体研究受到了人们的格外关注.研究表明与交流驱动相比,脉冲放电产生大气压等离子体具有许多优势,如它的VUV、氧原子、及臭氧的产生效率高;峰值电流密度、电子密度、及电子产生效率也更高;在对介质表面处理时能达到更好的处理效果和更高的效率;还更易产生均匀的大面积等离子体;所产生等离子体的非平衡性更高;灭菌效果也更好等优点.但是,对于脉冲放电的放电机理,放电模式,及脉冲参数(上升沿和下降沿、重复频率、脉冲宽度等)对放电效果的影响,现在的研究还非常有限,且很零散.这一方面是由于大气压放电诊断本身就很困难,另一方面,由于脉冲放电快速的时空演化过程进一步加大了对其诊断的难度.再者,对其研究还受到脉冲电源参数的限制.本文对国际上大气压脉冲放电等离子体最新研究的代表性研究成果做了一个综述,并对今后的研究方向提出了几点建议.

Recently, atmospheric pressure pulsed discharge has attracted lots of attentions. Research shows that there are lots of advantages by using pulsed discharge rather than by using traditional AC discharge, such as high VUV, O, and O3 generation efficiency, high peak current, high electron density and high electron generation efficiency, better treatment effect, easy obtaining homogeneous discharge, extreme non-equilibrium characteristic and high bacteria killing efficiency. However, researchers know only little about the mechanism and mode of the pulsed discharge, and how pulsed parameters （rising and falling time, repetition frequency, pulse width） affecting the discharge. There are mainly due to two reasons. First, it is a difficult task to diagnostics atmospheric pressure discharge plasma. Second, pulsed discharge is a fast behavior, which makes it even more difficult. On the other hand, research on pulsed discharge is also restricted due to lack of pulsed power supply of various parameters. In this paper, recent progresses on pulsed discharge plasma are reviewed and some suggestions on this research topic are also presented.