摘要
随着航天技术的发展,轻质反射镜的研究正朝着径厚比更大、轻量化更高的趋势发展。然而,当轻质镜面形精度峰谷(PV)值低于0.1λ时,镜面面形会明显产生波浪形的"压印效应"。重力及磨头压力所引入的"压印效应"已成为轻质结构反射镜高精度加工的技术壁垒。通过有限元Ansys软件仿真分析,采取从轻质镜结构内部施加反向压强的方法,消除轻质镜面抛光区域由于磨头压力及重力作用产生的镜面弹性形变,在满足普林斯顿去除函数方程条件下消除轻质镜面的"压印效应"。由仿真结果得到浸入充气式方法不但能消除"压印效应",反射镜抛光面面形精度更优于重力状态。
With the development of aerospace technology,research of lightweight reflector is focusing on the mirrors with a larger radius to thickness ratio and higher lightweighting.However,when the surface accuracy of lightweight mirrors,such as PV values of below 0.1λ,mirror surface will obviously shows "imprinting effect" like the wave.The "imprinting effect" derives from the gravity and the pressure of polishing head has become a barrier for high-precision processing of lightweight reflector.It is mainly researched a new way that fills air into the inside of mirrors to resist the elastic deformation resulting from the pressure of polishing head.The simulation result shows that the immersion charge-method can eliminate the "imprinting effect",and the shape accuracy of mirrors is also much better than that caused by gravity.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2011年第7期222-226,共5页
Acta Optica Sinica
关键词
光学制造
压印效应
有限元仿真
浸入式
optical fabrication
imprinting effect
finite element simulation
immersion method