Effects of electric field fringe on performances of grid strip capacitive MEMS devices
Effects of electric field fringe on performances of grid strip capacitive MEMS devices
基金
Supported by the National Natural Science Foundation of China （ No. 60903195 ） and the Key Technological Problems Tackling Project of Wuhan （No. 200750499172）.
关键词
MEMS器件
电容式
电网
地带
非线性变化
表演
电场
边缘效应
micro-electro-mechanical system effect, grid strip sensing capacitor, MEMS noise （MEMS）, capacitive sensor, capacitor fringe
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