磁控溅射台电控系统的改造

Reformation of the Electrical-controlling System of Magnetron Sputter

针对当前磁控溅射台存在真空自动准备和手动自动切换不完善等缺点,以DV602磁控溅射台为例,对其电控系统进行了改造。设计了以PLC为控制系统核心、以触摸屏为人机接口的电控系统,控制系统的可靠性和稳定性得到提高,且界面友好,操作方便。

These are some problems for existing magnetron sputters in the aspects of vacuum automatic preparation,switching at hand-control and autocontrol,etc.In this paper,DV-602 magnetron sputtering device is taken as the example to make modifications of the electrical-controlling system.The system takes PLC as the core controller and the touch screen as the man-machine interface,which makes the system own the features of friendly surface,simplicity and easy operation.After these modifications,the reliability and stability of the controlling system are greatly improved.