摘要
This paper presents an optimal design on surface acoustic wave reflective delay line using coupling of modes (COM) model. The reflection coefficient S11 of the SAW device is deduced to evaluate the device performance. Typical SAW reflective delay line consists of a piezoelectric substrate, an interdigital transducer (IDT) and several reflectors positioned along the acoustic propagation direction. The influences of the design parameters of the device, such as structure of the IDT, reflector types, etc. on device performance are investigated, and the optimal design parameters are determined. Based on these parameters, a 434 MHz SAW reflective delay line with single phase unidirectional transducers and three shorted grating reflectors is fabricated on 41° YX LiNbO3. The measured Sn agrees well with the simulated one. Sharp reflection peaks, high signal noise ratio (S/N), and low spurious noise between the reflection peaks are observed.
This paper presents an optimal design on surface acoustic wave reflective delay line using coupling of modes (COM) model. The reflection coefficient S11 of the SAW device is deduced to evaluate the device performance. Typical SAW reflective delay line consists of a piezoelectric substrate, an interdigital transducer (IDT) and several reflectors positioned along the acoustic propagation direction. The influences of the design parameters of the device, such as structure of the IDT, reflector types, etc. on device performance are investigated, and the optimal design parameters are determined. Based on these parameters, a 434 MHz SAW reflective delay line with single phase unidirectional transducers and three shorted grating reflectors is fabricated on 41° YX LiNbO3. The measured Sn agrees well with the simulated one. Sharp reflection peaks, high signal noise ratio (S/N), and low spurious noise between the reflection peaks are observed.
基金
supported by the National Nature Science Foundation of China(10974171)