移相干涉中移相误差测量与补偿

Measurement and Compensation of Phase-Shifting Deviation in Phase-Shifting Interferometry

移相干涉测量中对移相器的移相误差进行测量与补偿是提高该测量方法准确度的有效手段。通过研究移相干涉移相误差对测量结果的影响,提出了测量移相器工作时位移与角度变化的方法,建立了相应的实验测量装置,实现了移相器的位移及角度变化的测量。根据移相器中位移与角度的数学关系完成了移相误差的补偿,修正后的移相效果在移相干涉仪中采用了整周期移相干涉图灰度差值的方法进行了验证。

For improving the measurement accuracy of phase-shifting interferometry,the measurement and compensation of the phase-shifting deviation are very important.The method for measuring the displacement and angular change of the phase shifter is given in studying the measurement errors caused by phase-shifting deviation.The displacement and angle change of the phase shifter have been measured with a special experimental measuring device,and the phase-shifting deviation has also been compensated according to the mathematical relationship between displacement and angles of the phase shifter.At last,the modified phase-shifting effects in phase-shifting interferometer have been verified using the method of calculating the intensity difference between whole cycle phase-shifting interferograms.