集成电路静电放电模拟器校准与测量不确定度

Calibration of microcircuits ESD pulse simulator

集成电路静电放电模拟器是微电子元器件可靠性筛选的重要设备,通过模拟静电放电对器件的抗静电能力进行筛选.本文在分析静电放电模拟器工作原理的基础上,利用高频电流探头和高速率采样示波器实现了对模拟器的校准.文章还并结合校准实例,对测量不确定度进行了评定.

ESD pulse simulator is used to classify microcircuits according to their susceptibility to damage or degrada-tion by exposure to ESD.How to calibrate the simulator and give the measurement uncertainty is a problem to users.The article presents a method to calibrate IC ESD pulse simulator.Calibration equipment composed of hi-frequency current probe and oscilloscope.An example of calibration is laid out with the analyses of measurement uncertainties.