可消除热零点漂移的双压阻半桥压力传感器

Pressure Sensor Made of Two Piezoresistive Half-Bridges for Cancelling Thermal Zero Shift

提出一种可消除热零点漂移的压阻式压力传感器。该传感器由两个压阻半桥构成。两个“半桥”受力时输出信号的极性相反,而零压时输出信号极性相同。两桥输出信号相减后,其压敏输出与一个压阻全桥的输出值相同,而随温度变化的零压输出则相互抵消。

A pressure sensor which can cancel thermal zero shift is described.The sensor is made of two piezoresistive half-bridge.The output polarities of the two half-bridge are opposite as putting pressure on the sensor,and the output polarities are the same without pressure on the sensor.After subtracting one from another,the pressure sensitive output value is equal to that of a full piezoresisitive bridge,and the zero pressure output,which is changed with temperature,is cancelled.The expectative results are obtained in the modelling experiments.