摘要
详细介绍了以PSD为传感元件的石英摆片综合参数测试系统的测量原理、光路和电路。该系统可对石英摆片的摆幅、摆频、扭幅、扭频、台阶高度和挠性梁刚度等实现自动测量。
The structure, measurement principles and hardware of the application system of PSD are introduced in detail.This system can be used to measure the quartz pendulous reed's pendulous frequency, pendulous amplitude, torsional frequency, torsional amplitude, flexible bridge rigid, and so on.
出处
《传感器技术》
CSCD
1999年第5期41-43,共3页
Journal of Transducer Technology
关键词
石英摆片
参数测试系统
PSD
石英加速度计
PSD(Position sensitive detection) Quartz pendulous reed Parameter Test