摘要
介绍一种新型力敏元件Z元件的制备、机理和特性。
A new kind of force-sensitive element: Z-element is introduced and it's manufacturing, mechanism and characteristics are set forth. Using this kind of element to make tactile sensor will have many advantages.
出处
《传感器技术》
CSCD
1999年第5期54-55,共2页
Journal of Transducer Technology