摘要
一些Ⅲ主族以及过渡金属氮化物具有低逸出功以及稳定场发射的性 能，适合于用作ＦＥＡ发射微尖表面的薄膜。本文对这些氮化物薄膜作了制备与性 能方面的介绍。
Some nitrides of the main group Ⅲ elements and transition metal elements have the performance of low work function, high melting point and reliable emission. It' s very suitable for the film on the surface of FEA emission tips. The fabrication and perfor- mance of such films are introduced here.
出处
《光电子技术》
CAS
1999年第3期207-211,共5页
Optoelectronic Technology
