摘要
对氢气分析仪器中的核心传感器进行研究,采用基于MEMS工艺的微型热导传感器,代替现有分析仪器常用热导池检测器,设计了氢气浓度检测系统机械结构;设计信号调理电路,并在传感器外部设计环境温度控制电路,以实现传感器的恒温检测。传感器输出的微弱信号经测量电桥调理输出,通过集成运算放大器加法、放大运算,最后把标准电压信号送入单片机的测量系统进行后续处理;开发了基于单片机的信号调理、温度控制和电源控制模块,构建氢气浓度在线检测系统;从安全、节能的角度保证传感器的使用性能,并结合工程实践进行了实验验证,结果表明了该检测系统的可行性。
The core sensor of hydrogen analysis instrument is studied.The mechanical struture of hydrogen concentration test system is designed by using MEMS based micro-flow gas thermal conductivity sensor.The signal conditioning circuit and the environment temperature control circuit in the external of the sensor are designed,in order to achieve constant temperature of the test sensor.The weak output signal of sensor is sended out through the measuring bridge,amplificated by the added circuit.The standard voltage signal is carried into the measurement system of MCU.The performance of the instrument is tested in engineering practice,and the result shows that the test system is feasible.
出处
《控制工程》
CSCD
北大核心
2011年第4期505-508,617,共5页
Control Engineering of China
基金
江苏省高校自然科学研究项目资助(10KJB460004)
关键词
热导传感器
检测系统
温度控制
thermal conductivity sensor
test system
temperature control
