摘要
介绍了一种新型的纳米级精度位移测量激光干涉仪的设计原理与应用，该干涉仪以独特的光学原理被命名为“耦合差动式激光干涉仪”．其结构简洁紧凑，性能稳定，光路布局对称性好，不存在死光程，光程差倍增，容易装调，符合阿贝原则和结构变形最小原则，在１０ｍｍ （可以扩展至５０ ｍ ｍ ）测量范围内，获得了λ／８００ 的分辨力和纳米级的测量精度．
A new laser displacement measurement interferometer with nanometric accuracy has been developed.It's defined “Coupled Differential Interferometer”.The new interferometer is simple in concept,stable in performance,easy to set up and align,symmetric in optical paths and free of optical deadpath.A λ /800 resolution and an accuracy of a few nanometers can be achieved within the range of 10 mm.
出处
《天津大学学报》
EI
CAS
CSCD
1999年第6期665-667,共3页
Journal of Tianjin University(Science and Technology)
关键词
纳米计量
位移测量
激光干涉仪
纳米级精度
nanometrology laser displacement measurement differential interferometry laser interferometer
