测量微米级薄膜厚度与弹性模量的一种新方法

A New Approach of Determination of Thickness and Elastic Modulus of Thin Film

提出一种决定镀在玻璃板上的薄膜力学性能的新方法。根据复合材料力学，建立了弯曲条件下复合梁的分析模型，并导出了相应的应变响应关系。用此模型测出了微米级薄膜的厚度和弹性模量。

A new approach to determine mechanical behaviors of thin film coating on glass plate is presented. On Basis of composite mechanics, an analytical model of composite beam under bending is established and the corresponding deformation response is formulated. Making use of the result ,the values of the thickness and elastic modulus of the thin films are measured.