PVDF传感器在高速圆度检测系统中的应用

Application of PVDF Film Transducer in the High-speed Roundness Measurement System

由于圆度误差是机械零件加工过程中影响其互换性的关键指标,所以必须对圆度误差进行评定。利用聚偏氟乙烯(PVDF)压电薄膜的响应时间快、频响范围宽等特性,设计了基于PVDF传感器的高速圆度检测系统。实验结果表明:该PVDF传感器测量频率响应在1 200 Hz上,解决了电感传感器在高速圆度检测中结果失真的问题。测量数据分析结果表明:此系统圆度测量误差在1μm以内,具有较高的重复精度。

For the demands of high speed and efficiency of on-line measurement of roundness in machining industry, a kind of high-speed roundness measurement system based on the piezoelectric displacement transducer that used PVDF film was developed. It can be used to achieve the goal of high-speed roundness measurement by combining with charge amplifier and taking advantages of transducer such as the high frequency, sensitivity and signal-to-noise ratio. The experimental results show that the measuring frequen- cy response of the PVDF transducer is over 1 200 Hz which solved the problem of distortion measurement that caused by inductive transducer in high-speed measurement. The measuring results show that the roundness error of this system is less than 1 μm. Repeated measurements show that the measurement results of the system has high reproducibility and reliability.