高功率脉冲电源的研制

Development of High Power Pulse Supply

高功率脉冲磁控溅射以其高离化率、高薄膜性能等特点得到广泛关注。介绍了高功率脉冲电源系统的原理和研制,提出了基于全桥逆变、电容储能、均流斩波等环节实现电源的方案,分别阐述了主回路、控制系统、保护电路的设计思路。电源系统采用全桥逆变实现初级能源,电容储能实现中间能源,均流斩波实现功率输出,单片机和SG3525实现控制部分。实验结果证明电源运行可靠,输出特性良好,抗干扰能力强。

High-power pulse magnetron sputtering technology attracts more and more attention owing to its high ioniza-tion rate and high performance films,and high power pulsed supply is the important part of this technology.The work-ing principle and development of the power supply system are introduced,the power scheme based on full-bridge in-verter,capacitor energy storage and current sharing chopping circuit is established and the design ideas of the main circuit,control system and protection circuit are introduced.The power system uses the full-bridge inverter as a prima-ry energy,the capacitor energy storage as a intermediate energy,the SCM and SG3525 as control section.The test re-sults demonstrate the reliable operation,high quality of output and strong anti-interference ability of this power system.