ZnMgO合金薄膜晶体质量与生长温度的依赖关系

The Relationship between Crystal Quality of ZnMgO Alloy Film and the Growth Temperature

利用等离子体分子辅助分子束外延设备在蓝宝石衬底上通过改变生长温度,得到了不同的ZnMgO合金薄膜。研究了衬底温度对ZnMgO的结构和光学性质的影响。X射线衍射谱表明所有的ZnMgO合金样品都是(002)取向。晶体结构为六角纤锌矿。随着生长温度的增加,ZnMgO的(002)衍射峰的最大半宽度逐渐减小。在ZnMgO合金中的Mg组分随衬底温度升高逐渐增大。样品的表面形貌随着衬底的温度改变而变化。ZnMgO的X射线衍射,透射光谱,光致发光谱和扫描电镜照片都表明在800℃得到了高质量的ZnMgO合金薄膜。并且通过控制衬底温度实现了ZnMgO中Mg组分的调节。

The ZnMgO films with different growth temperature were fabricated on c-Al2O3 substrates by the plasmas assistant molecular beam epitaxy（P-MBE）.The relationship between the growth temperature and structural and optical properties was studied.The XRD indicated all the ZnMgO films were with the（002） preference reflection of hexagonal wurtzite structure.The full width at half maximum（FWHM） of the（002） diffraction peak decreased as the growth temperature increased.The Mg contents of the ZnMgO increased with increasing temperature.The surface morphology of ZnMgO with different growth temperature films changed gradually.The X-ray diffraction spectroscopy,transmission spectrum,photoluminescence and scanning electron microscope indicated that the high quality ZnMgO alloy obtained at 800 ℃.The Mg contents of ZnMgO alloy could be controlled by changing the growth temperature.