电子束曝光机自动输片系统研制

The Development of Auto-Pallet Transportig System for E-Beam Photography

本文概略地介绍了在电了束曝光机上使用的自动输片系统的要求以及其组成部分;较详细地叙述了送取片机构(机械手)的动作过程,并对系统的控制原理及软件设计进行了说明。

The demand for auto-transporting system and its constitution have been briefly presented in the paper, and the action process of the pallet feeding mechanism (manipulator) is described in detail. The control principle and software design of the system are also described.