摘要
结合洁净厂房设计和高效空气过滤器的相关规范,介绍了PAO计数扫描检漏方法。
Based on code for design of clean room and high efficiency particulate air filter,this paper gives an account of leak detection methods on data-calculating scanning by PAO.
关键词
高效空气过滤器
计数扫描
检漏
PAO
High efficiency particulate air filter （HEPA）
Data-calculating scanning
Leak detection
PAO
