有机太阳能电池无铟透明电极的光电性能研究

Optical and Electrical Properties of Indium-Free Transparent Electrodes for Organic Solar Cells

以氧化锌铝陶瓷靶为溅射源,采用射频磁控溅射方法制备了铝掺杂氧化锌(AZO)无铟透明导电薄膜,通过X射线衍射仪、分光光度计和四探针仪等测试分析,研究了基板温度对薄膜晶体结构、力学和光电性能的影响.结果表明:所制备的AZO薄膜均为六角纤锌矿结构,并具有(002)择优取向,其晶体结构、残余应力、方块电阻、光学带隙以及优良指数等都与基板温度相关,当温度为400℃时,AZO薄膜的优良指数最大(0.40-Ω1),具有最好的光电综合性能.

Aluminum-doped zinc oxide（AZO） thin films were deposited by radio-frequency magnetron sputtering method using a sintered ceramic target.The influence of substrate temperature on crystalline,mechanical,optical and electrical properties of AZO films was investigated by X-ray diffraction,four-point probe and optical transmission spectroscopy.The results show that all the obtained films are polycrystalline with a hexagonal wurtzite structure and grow preferentially in the（002） direction.The mechanical and optoelectrical properties of AZO films are closely related to the substrate temperature.The AZO film deposited at substrate temperature of 400 ℃ possesses the best synthetic optoelectrical properties,with the highest transmittance and the highest figure of merit（0.4 Ω-1）.