冷坩埚原理及其在多晶硅制备中的应用

Cold Crucible Theory and Its Application in Preparing of Multicrystalline Silicon

综述了冷坩埚技术的原理、特点与技术要求,重点介绍了电磁冷坩埚技术的工艺性能与影响因素,总结了各因素对冷坩埚性能的影响规律,最后概述了冷坩埚技术在多晶硅提纯与成型制备中的优势和应用,并展望了其未来的发展。

The principle,characteristic and technical requirements of cold crucible are reviewed in this paper.The theory,technical parameters and influencing factors of cold crucible are introduced.Effects of technical factors on cold crucible performance are summarized.The advantages and application of purifying and preparing of multicrytalline silicon with cold crucible are overviewed too.Cold crucible technology will be a hopeful and important technique in materials engineering.