工业纯钛电子背散射衍射试样的制备

Commercial Pure Titanium Sample Preparation for EBSD

电子背散射衍射(EBSD)是一种较新的用来分析多晶体显微结构和组织的扫描电子显微镜技术,其试样的制备对其成像质量至关重要。通过对工业纯钛EBSD试样制备经验的总结,介绍了工业纯钛EBSD试样制备过程中切割、磨制、机械抛光、离子刻蚀和电解抛光等关键操作,提出了在EBSD试样制备过程中应注意的事项和技术要点。

Electronic backscatter diffraction （EBSD） is a relatively new technique used in scanning electron microscopy to analyse the polycrystaI microscopic structure and texture. The sample preparation has great effect on the imaging quality. According to the experiment of preparation of commercial pure titanium, some essential operations such as cutting, grinding, mechanical polishing, ion etching and electrolytic polishing in the preparation of commercial pure titanium EBSD samples are introduced. Main techniques and matters needing attention are put forward.