光学薄膜发射光谱分析中的标样应用

Application of Standard Sample in Thin Film Spectral Analysis

通过对导电的铝镁合金膜、不导电的Ti○_2一Ta_2○_5介质膜和半导体ZnSe光学膜层成份直接分析,提出了三种光学薄膜光谱标样制备的新方法。在考察测定系统误差和放电机制之后,提出了光学薄膜成份分析和一般光谱分析对标样不同要求的三点新看法。

In this paper three new methods of spectral startdard sample preparation of the optical thin film are proposed by direct spectral analysis of condue- tive Al-Mg alloy thin film,non-conductive Ti○_2-Ta_2○_5 thin film and semi- conductive ZnSe optical thin film composition. On the basis of studing systematical measuring error and dischange mechanism three new views of optical thinfilm composition analysis and normal spectral analysis versue different startdard samples are put forward.