摘要
介绍了基于传输反射法理论改进,组建了室温(R.T.)~600℃,400MHz~18GHz介电常数测量系统。分别从系统组成和测试方法两个方面入手,详细介绍高温传输反射测试系统对器件的材质、工艺、性能指标等特殊要求,重点介绍了高温测试用到的校准技术、高温修正算法、时域门技术、尺寸误差修正、自动控制等理论和技术难题。并佐以实验进行验证,试验结果与标称值符合良好。
Introduces a automatic measurement method of permittivity in high temperature(R.T.~600℃) and broadband(400MHz~18GHz) using improved transmission/reflection method.Mainly including the material,technics and performance of the high temperature system and some key techniques such as calibration,corrected arithmetic,time gate,size error corrected and automatic control etc applied in the system.Finally tested results given in the paper is well according to the standard value.
出处
《宇航计测技术》
CSCD
2011年第3期12-15,共4页
Journal of Astronautic Metrology and Measurement
关键词
高温宽带
高温修正
时域门
测试方法
High temperature broadband High temperature corrected Time gate Measurement method