摘要
为了提高半闭环微阵列制备机器人的定位精度,根据机器人运动误差具有方向性的特点,提出了分向前馈误差补偿技术。建立了微阵列制备机器人系统误差前馈补偿的传递函数模型,对系统的准确性、快速性与稳定性进行分析,从理论上证明该方法在提高机器人精度方面是可行有效的。研究并实施了回程误差与其他非线性误差的分向补偿算法。在清华大学开发的THU-biorobot微阵列制备机器人上进行了实验研究。结果表明:补偿后机器人的定位精度在±5μm以内,系统动态性能也有显著提高,能够满足微阵列制备要求。
The positioning accuracy of a semi-closed control loop for a robot to produce microarrays was improved by a two-way feed-forward error compensation method based on the fact that the motion errors of the robot are directional.The motion control transfer function including the feed-forward compensation block was used to analyze the accuracy,speed and stability of the robotic system.This showed that error compensation method can significantly improve the accuracy.Two-way error compensation was then developed for the hysteresis error and other nonlinear errors.Tests on the THU-biorobot microarray production system demonstrated by Tsinghua University that the positioning error was reduced to less than ±5 μm,with the dynamic performance significantly improved by the error compensation method.
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2011年第5期582-586,共5页
Journal of Tsinghua University(Science and Technology)
基金
国家“八六三”高技术项目(2009AA043701)
摩擦学国家重点实验室项目(SKLT09A03)
关键词
微阵列制备机器人
定位精度
分向补偿
前馈误差补偿
回程误差
microarray making robot
positioning accuracy
two-way error compensation
forward error compensation
hysteresis error
