摘要
模仿生物复眼,采用光刻离子交换法,在球面玻璃基片中制作了折射率呈三维梯度变化、排列紧密和光学性能良好的微透镜阵列。单元微透镜孔径呈正六角形,光斑大小为4.92μm,相邻透镜元中心距为0.5mm,掩埋透镜高为0.194mm。微透镜阵列具有对称均匀的光学特性,截距自中心至边缘逐渐变小,数值孔径(N.A.)自中心向边缘逐渐变大,填充因子(FF)接近100%,能模仿复眼的部分光学特性。
A compound eye simulated by microlens array was fabricated by photolithography and ion-ex change. The microlens array with 3D gradient index distribution, gapless arrangement and fine optical characteristics is buried in the convex glass substrate. Each hexagonal microlens in the array has a spot size,the center distance between two adjacent microlenses and the buried depth of 4.92 μm,0.5 mm and 0. 194 ram, respectively. The measurement results show that the fabricated microlens array has symmetrical optical features, and the focal length of microlens decreases a little from the center to the edge of the substrate while N. A increases a little. The fill factor of the microlens array reaches 100% nearly. This spherical microlens array can simulate a compound eye in some optical characteristics.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2011年第8期1143-1146,共4页
Journal of Optoelectronics·Laser
基金
国家自然科学基金资助项目(60978046)
西南大学发展基金资助项目(SWUF2007027)
关键词
微透镜阵列
光刻离子交换
掩埋式
复眼
六角形
microlens array
photolithography and ion-exchange
buried
compound eye
hexagonal
