二维时域有限差分法提取高温超导互连线频变等效电路参数

Frequency Dependent Equivalent Circuit Parameters Extraction of High TC Superconducting Interconnects by Using 2 DFDTD Method

采用二维时域有限差分（ＦＤＴＤ）法分析用于超大规模集成电路（ＶＬＳＩ）封装互连的高温超导互连线的传输特性，并提取其频变等效电路参数．结合描述超导特性的Ｌｏｎｄｏｎ 第一方程与Ｍａｘｗｅｌｌ方程进行二维ＦＤＴＤ分析，建立稳定的差分格式．在时域模拟过程中，非均匀渐变网格划分法的运用和时间序列预测模型的提出，大大节约了计算机内存和计算时间．计算结果和三维ＦＤＴＤ法分析结果比较，一致性较好，且提高了分析效率．

The propagation characteristics of high TC superconducting interconnects for VLSIpackaging w ere analyzed by using the two dim ensional finite difference tim e dom ain (FDTD) m ethod and the frequency dependentequivalentcircuitparam eterswere abstracted from thetim e dom ain results. Thefirst London equation and Maxw ell equations w ere com bined into the 2 D FDTD analysis and the stable difference form ulations w ere obtained. In the procedure oftim e dom ain sim ulation, application ofgraded m esh and presentation oftim eseriesprediction m odelreducecom puterm em ory and tim edram atically. The resultsare in good agreem entw ith those from three dim ensionalFDTD.