半导体制造系统改进Petri网模型的建立及优化调度

Optimal scheduling of semiconductor manufacture system based on improved Petri net model

为了更有效优化半导体制造系统生产资源调度,提出了基于分层着色时间Petri网模型的分时段优化调度方案.通过增强基本Petri网的描述能力和引入分层Petri网的思想,根据半导体制造系统的结构建立其改进Petri网模型-分层着色时间Petri网模型,并在模型中引入调度库所将调度算法嵌入到模型中,该模型能有效地克服基本Petri网模型规模膨胀的缺陷;同时将每一生产周期分成若干时间段,利用遗传算法来寻找各时间段内调度规则组合来优化半导体制造系统的动态性能,实现分时段优化调度,编码时,根据机器组的利用率来选择部分机器组为瓶颈机器组,重点调度瓶颈机器组,提高算法的搜索效率;仿真实验结果验证了该调度方案的优越性.

In order to optimize the resources scheduling of semiconductor manufacturing system （SMS） more effectively, the hierarchical colored-timed Petri net （HCTPN） model based multi-phase optimal scheduling （MPOS） approach was proposed. Through the description enhancement and hierarchical idea for the basic Petri net, an improved Petri net model named HCTPN model was established, the HCTPN model can overcome the risk of model explosion of basic Petri net, and the scheduling place was embedded into the HCTPN model for the MPOS. At the same time, the MPOS was realized by dividing a production cycle into multi phases, the genetic algorithm （GA） was used to optimize the combination of integrated rules at each phase~ the bottleneck machine groups were identified by their utilization rates, and the search efficiency of MPOS was improved by emphasizing the bottleneck machine groups through coding phase of GA. The results of simulation experiments verify the feasibility of the proposed strategy.