利用Zemax辅助标定长期存放的大口径圆形离轴非球面

Zemax aided labeling for long-term stored large-aperture circular off-axis aspheric surface

检测标定了一块放置多年的Φ530 mm离轴非球面。根据当年的结构参数,在光学设计软件Zemax中建立了该离轴非球面的检测模型。利用y轴离心和x轴倾斜实现了离轴和光束倾斜。通过对某结构参数多次赋值,并将其他结构参数设为变量,优化并观察干涉图变化,找到最佳参数值。根据Zemax对参数的优化结果,使用4D干涉仪和Φ510 mm的平面反射镜,搭建实际检测光路,观察干涉图并进行微调,测得最终结果。去彗差和像散前后图像PV值几乎不变,达到了调节标定要求。使用Zemax软件辅助干涉仪对离轴非球面的检测,大大提高了检测效率,有利于光学加工效率的提高。

An Φ530 mm off-axis aspheric surface was labeled after years of storage.According to the parameters at that time,the test model was built in optical design software Zemax.The Y decenter and the tilt about X standed for off-axis amount and the tilt of light beam respectively.In this paper,one configuration parameter was set as fixed value time after time,while other parameters were set as variable value.Then the corresponding interferogram was optimized and analyzed and the optimum parameter was found.With the optimization result,the practical test path was set up with a 4D interferometer and an Φ510 mm high precision plane mirror,whose surface error can be ignored.Through observing interferogram and fine adjustment,the final test result was obtained.The PV value was unchanged after coma aberration and astigmatism being removed which achieved the labeling request.Zemax aided with interferometer greatly reduces test time.It helps to improve optics manufacture efficiency indirectly.